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Determination of electron density and electron collision frequency in a plasma by an rf nonimmersive probe

Journal Article · · J. Appl. Phys., v. 44, no. 9, pp. 3975-3979
DOI:https://doi.org/10.1063/1.1662882· OSTI ID:4357695
A method is presented for determining the electron density and electron collision frequency in a cylindrical plasma column by placing an rf coil coaxially around the plasma and measuring the coil impedance. Simplified expressions relating the impedance to plasma parameters are found to be valid under certain suitable conditions. The plasma of a hot-cathode low-pressure dc discharge in argon was studied by an rf coil probe. The dependence of electron collision frequency on electron velocity was taken into account. The values of the electron density and average collision frequency, as obtained from the rf probe under different discharge conditions, are in fairly good agreement with those given by a cylindrical Langmuir probe. (auth)
Research Organization:
Saha Inst. of Nuclear Physics, Calcutta
Sponsoring Organization:
USDOE
NSA Number:
NSA-29-019851
OSTI ID:
4357695
Journal Information:
J. Appl. Phys., v. 44, no. 9, pp. 3975-3979, Journal Name: J. Appl. Phys., v. 44, no. 9, pp. 3975-3979; ISSN JAPIA
Country of Publication:
Country unknown/Code not available
Language:
English

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