Reactive magnetron sputter deposition of polycrystalline vanadium nitride films

Journal Article · Fri Nov 01 04:00:00 EST 1996 · Journal of Vacuum Science and Technology, A

DOI:https://doi.org/10.1116/1.580180· OSTI ID:434735

Chu, X; Barnett, S A ^[1]; Wong, M S; Sproul, W D ^[2]

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1. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (United States)
2. BIRL Industrial Research Laboratory, Northwestern University, Evanston, Illinois 60201 (United States)

Polycrystalline vanadium nitride films were deposited onto M2 steel substrates using a high-rate reactive dc magnetron sputtering system by sputtering vanadium metal in an Ar+N{sub 2} atmosphere under N{sub 2} partial pressure control. The crystal structure, surface morphology, and properties of the films were affected by several process parameters such as nitrogen partial pressure, target power, and negative substrate bias. Analytical techniques including x-ray diffraction and scanning electron microscopy were used to characterize the structure and morphology of the films, and the mechanical properties of the films were measured by a Vickers microhardness and a scratch adhesion testers. The nitrogen partial pressure was found to be the dominant deposition parameter for the formation of different phases which includes crystalline V metal, hexagonal {beta}-V{sub 2}N{sub {ital x}}, and cubic {delta}-VN{sub {ital x}}, amorphous V{endash}N{sub {ital x}} solid solution, and their mixtures. The film hardness was affected by crystalline phase, and a maximum hardness of 3000 kgf/mm{sup 2} Hv{sub 0.05} was found at the {beta}-V{sub 2}N{sub {ital x}} phase. The morphology of the films varied in a wide range from cauliflowerlike rough and porous surface to smooth and dense surface, and can be correlated to deposition parameters. {copyright} {ital 1996 American Vacuum Society}

• OSTI ID: 434735
• Journal Information: Journal of Vacuum Science and Technology, A, Journal Name: Journal of Vacuum Science and Technology, A Journal Issue: 6 Vol. 14; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ADHESION
CRYSTAL STRUCTURE
DEPOSITION
FILMS
HIGH-FREQUENCY DISCHARGES
MECHANICAL PROPERTIES
MICROSTRUCTURE
MORPHOLOGY
PHASE STUDIES
POLYCRYSTALS
PROTECTIVE COATINGS
SPUTTERING
STEELS
VANADIUM NITRIDES