Microanalytical uses of small-diameter charged-particle beams
BS>It is often necessary to obtain aralytical data on samples of small volume either to characterize qualitatively or quantitatively microquantities or to permit the study of local variations in composition. The charged particle flux produced by high voltage accelerators can be focused to diameters of several microns perrmitting numerous methods of charged particle activation methods to be applied to the analysis of small volumes. The analytical data can be deduced from the selective examination of radiations emitted during charged-particle irradiation. This can include elastic scattering, determination of the charged particles emitted, and gamma and x emission. The local concentration variations of an element can be followed by sweeping the surface of a sample with an ion beam either by mechanical movement of the sample or by deflection of the beam. The microbeam techniques are used to obtain data on metallurgical, mineralogical, and semiconductor surfaces. The techniques used at Harwell and some typical results are discussed. (tr-auth)
- Research Organization:
- Atomic Energy Research Establishment, Harwell, Eng.
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-29-028975
- OSTI ID:
- 4301792
- Journal Information:
- J. Radioanal. Chem., v. 17, no. 1-2, pp. 55-63, Conference: International colloquium on activation analysis of very low amounts of elements, Saclay, France, 2 Oct 1972; Other Information: Orig. Receipt Date: 30-JUN-74
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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