Comparison of backscattering spectrometry and secondary ion mass spectrometry by analysis of tantalum pentoxide layers
Journal Article
·
· Anal. Chem., v. 46, no. 14, pp. 2136-2141
- Research Organization:
- California Inst. of Tech., Pasadena
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-31-010553
- OSTI ID:
- 4242048
- Journal Information:
- Anal. Chem., v. 46, no. 14, pp. 2136-2141, Other Information: Orig. Receipt Date: 30-JUN-75
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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