Ion temperatures in inductively coupled plasmas
- Sandia National Labs., Albuquerque, NM (United States)
Atomic chlorine and argon ion temperatures have been measured in inductively coupled plasma using laser induced fluorescence. Argon ion temperatures were determined. Chlorine ion temperatures were determined. Cl{sup +} temperatures were measured in both pure chlorine and argon/chlorine mixtures while the Ar{sup +} temperatures were measured in pure argon discharges. In the center of the plasma, the Ar{sup +} temperature was between 550 and 1,000 K for plasma powers between 30 and 240 W and pressures between 4 and 50 mTorr. Over this same operational parameter space, the Cl{sup +} temperature was between 2,100 and 4,500 K. At the edge of the plasma, the Ar{sup +} temperature increased to between 3,000 and 9,000 K. Ar{sup +} drift velocity in the radial direction was between 1 {times} 10{sup 5} and 2 {times} 10{sup 5} cm/s at the edge of the plasma. Ion temperatures as a function of plasma power, pressure, argon/chlorine ratio and spatial location will be presented.
- Research Organization:
- Sandia National Laboratory
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 419661
- Report Number(s):
- CONF-960634--
- Country of Publication:
- United States
- Language:
- English
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