Precision non-contact polishing tool

Patent · Tue Jan 07 00:00:00 EST 1997

OSTI ID:415751

Taylor, J S

A non-contact polishing tool is disclosed that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required. 5 figs.

• Research Organization: Univ. of California (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Univ. of California, Oakland, CA (United States)
• Patent Number(s): US 5,591,068/A/
• Application Number: PAN: 8-403,035
• OSTI ID: 415751
• Resource Relation: Other Information: PBD: 7 Jan 1997
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
MACHINE TOOLS
DESIGN
OPTICAL SYSTEMS
SLURRIES
SURFACE FINISHING
USES