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SPUTTERING OF TANTALUM AND TANTALUM--NIOBIUM SINGLE CRYSTALS.

Journal Article · · Sov. Phys.-Solid State (Engl. Transl.) 11: 2037-40(Mar 1970).
OSTI ID:4156713
; ;
Research Organization:
Originating Research Org. not identified
NSA Number:
NSA-24-024111
OSTI ID:
4156713
Journal Information:
Sov. Phys.-Solid State (Engl. Transl.) 11: 2037-40(Mar 1970)., Journal Name: Sov. Phys.-Solid State (Engl. Transl.) 11: 2037-40(Mar 1970).
Country of Publication:
Country unknown/Code not available
Language:
English

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Related Subjects

ANGULAR DISTRIBUTION
ANISOTROPY
ARGON
ARGON IONS/reactions with tantalum and tantalum-- niobium single crystals at 70 keV
angular distribution of sputtering
ION BEAMS
KEV RANGE
MONOCRYSTALS
N33110* --Physics (Solid State)--Radiation Effects
NIOBIUM ALLOYS AND SYSTEMS/Nb--Ta-base
sputtering by argon ions of single-crystal
angular distribution
NIOBIUM ALLOYS-- TANTALUM ALLOYS
SPUTTERING
TANTALUM ALLOYS AND SYSTEMS/Nb--Ta-base
sputtering by argon ions of single-crystal
angular distribution
TANTALUM/sputtering by argon ions of single-crystal
angular distribution
TEMPERATURE TANTALUM