Indium oxide deposition on glass by aerosol pyrolysis (Pyrosol/sup (R)/ process)

Conference · Wed Jan 01 00:00:00 EST 1975

OSTI ID:4114742

Blandenet, G; Lagarde, Y; Spitz, J; Blocher, Jr, J M; Hintermann, H E; Hall, L H ^[1]

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1. eds.

The Pyrosol/sup (R)/ process involves the pyrolysis of an aerosol generated by ultrasonic nebulisation from a solution of organic or inorganic compounds. This technique was used to deposit transparent n-conducting indium oxide films on glass. The electrical and optical properties of these films were studied as a function of the deposition temperature and doping (using tin or fluorine). A deposition temperature of 480$sup 0$C and a Sn/In ratio of about 5 percent gave the best results. In this case, the transmission in the visible range was 92 percent, the infrared reflection 84 percent and the electrical resistivity 1.7 x 10$sup -4$$Omega$. cm. (auth)

• Research Organization: CEN, Grenoble, France
• NSA Number: NSA-33-015213
• OSTI ID: 4114742
• Resource Relation: Conference: 5. international conference on chemistry vapor deposition, Burkinghamshire, UK, 21 Sep 1975; Other Information: See CONF-750991--. Orig. Receipt Date: 30-JUN-76; Related Information: Chemical vapor deposition
• Country of Publication: United States
• Language: English

Related Subjects

N50120* -Metals
Ceramics
& Other Materials-Ceramics & Cermets-Preparation & Fabrication
360201* -Materials-Ceramics
Cermets & Refractories- Preparation & Fabrication
*INDIUM OXIDES- DEPOSITION
AEROSOLS
DOPED MATERIALS
ELECTRICAL PROPERTIES
GLASS
OPTICAL PROPERTIES
PYROLYSIS
TEMPERATURE DEPENDENCE