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PREPARATION AND PROPERTIES OF PYROLYTIC ZIRCONIUM DIOXIDE FILMS.

Journal Article · · J. Electrochem. Soc. 118: 747-54(May 1971).
DOI:https://doi.org/10.1149/1.2408157· OSTI ID:4065581
; ;
Research Organization:
Bell Telephone Labs., Inc., Allentown, Pa.
Sponsoring Organization:
USDOE
NSA Number:
NSA-25-035564
OSTI ID:
4065581
Journal Information:
J. Electrochem. Soc. 118: 747-54(May 1971)., Journal Name: J. Electrochem. Soc. 118: 747-54(May 1971).; ISSN JESOA
Country of Publication:
Country unknown/Code not available
Language:
English

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Related Subjects

CHEMICAL REACTIONS
ELECTRIC CONDUCTIVITY
FILMS
MICROSTRUCTURE
N30220 --Metals
Ceramics
& Other Materials--Ceramics & Cermets--Preparation & Fabrication
N30230* --Metals
Ceramics
& Other Materials--Ceramics & Cermets--Properties Evaluations
N33120 --Physics (Solid State)--Physical Properties
OPTICAL PROPERTIES
SILICON
SOLIDIFICATION
SUBSTRATES
VAPORS
ZIRCONIUM OXIDES
ZIRCONIUM OXIDES/ properties of thin chemical vapor-deposited films of, chemical, electric, and structural
ZIRCONIUM OXIDES/preparation of thin pyrolytic films of
by chemical vapor deposition on silicon substrates