Retention of the Potential Energy of Multiply Charged Argon Ions Incident on Copper
Journal Article
·
· Physical Review Letters
The retained fraction of the potential energy of argon ions incident on copper has been measured using stationary calorimetry at charge states up to 9+ and kinetic energies ranging from 75 to 240eV per ionic charge. An average fraction of 30% to 40% is found with little dependence on the charge number and on the kinetic energy. The retention of the total energy ranges from 60% to 75% and can mainly be accounted for by the retained fraction of the potential energy and the collisional energy lost by reflected ions and sputtered target atoms.
- Sponsoring Organization:
- (US)
- OSTI ID:
- 40277536
- Journal Information:
- Physical Review Letters, Vol. 87, Issue 10; Other Information: DOI: 10.1103/PhysRevLett.87.105504; Othernumber: PRLTAO000087000010105504000001; 010137PRL; PBD: 3 Sep 2001; ISSN 0031-9007
- Publisher:
- The American Physical Society
- Country of Publication:
- United States
- Language:
- English
Similar Records
Channels of Potential Energy Dissipation during Multiply Charged Argon-Ion Bombardment of Copper
Ion-energy distributions at a substrate in reactive magnetron sputtering discharges in Ar/H{sub 2}S from copper, indium, and tungsten targets
Order-of-magnitude differences in retention of low-energy Ar implanted in Si and SiO{sub 2}
Journal Article
·
Fri Jun 01 00:00:00 EDT 2007
· Physical Review Letters
·
OSTI ID:40277536
+2 more
Ion-energy distributions at a substrate in reactive magnetron sputtering discharges in Ar/H{sub 2}S from copper, indium, and tungsten targets
Journal Article
·
Sun Mar 01 00:00:00 EST 2009
· Journal of Applied Physics
·
OSTI ID:40277536
Order-of-magnitude differences in retention of low-energy Ar implanted in Si and SiO{sub 2}
Journal Article
·
Thu Sep 15 00:00:00 EDT 2016
· Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
·
OSTI ID:40277536
+1 more