Influence of surface roughness on the intensity of elastically scattered low-energy noble-gas ions

Journal Article · Thu Apr 01 00:00:00 EST 1976 · J. Appl. Phys., v. 47, no. 4, pp. 1253-1255

DOI:https://doi.org/10.1063/1.322847· OSTI ID:4023249

Nelson, G C

The influence of surface roughness on the intensity of elastically scattered low-energy noble-gas ions has been determined for surfaces whose surface displacements are normally distributed. This has been done by modeling the effect of shadowing on the scattered-ion intensity. The experimental results are in good agreement with the values predicted by the model. (AIP)

• Research Organization: Sandia Laboratories, Albuquerque, New Mexico 87115
• Sponsoring Organization: USDOE
• NSA Number: NSA-33-031045
• OSTI ID: 4023249
• Journal Information: J. Appl. Phys., v. 47, no. 4, pp. 1253-1255, Other Information: Orig. Receipt Date: 30-JUN-76
• Country of Publication: United States
• Language: English

Related Subjects

N60100* -Physics (Atomic & Molecular)-Atomic
Electron
Ion & Molecular Beams & Reactions
640301* -Physics Research-Atomic
Molecular & Chemical Physics-Beams & Their Reactions
*HELIUM IONS- COLLISIONS
*NEON IONS- COLLISIONS
*SURFACES- ION SCATTERING ANALYSIS
ELASTIC SCATTERING
ENERGY SPECTRA
FILMS
GOLD
ION BEAMS
KEV RANGE 01-10
ROUGHNESS