MOLECULAR VACUUM PUMP
Patent
·
OSTI ID:4022081
A multiple molecular vacuum pump capable of producing a vacuum of the order of 10/sup -9/ mm Hg is described. The pump comprises a casing of an aggregate of paired and matched cylindrical plates, a recessed portion on one face of each plate concentrically positioned formed by a radially extending wall and matching the similarly recessed portion of its twin plate of that pair of plates and for all paired and matched plates; a plurality of grooves formed in the radially extending walls of each and all recesses progressing in a spiral manner from their respective starting points out at the periphery of the recess inwardly to the central area; a plurality of rotors rotatably mounted to closely occupy the spaces as presented by the paired and matched recesses between all paired plates; a hollowed drive-shaft perforated at points adjacent to the termini of all spiral grooves; inlet ports at the starting points of all grooves and through all plates at common points to each respectively; and a common outlet passage presented by the hollow portion of the perforated hollowed drive-shaft of the molecular pump. (AEC)
- Research Organization:
- Originating Research Org. not identified
- NSA Number:
- NSA-15-024937
- Assignee:
- U.S. Atomic Energy Commission
- Patent Number(s):
- US 2954157
- OSTI ID:
- 4022081
- Country of Publication:
- United States
- Language:
- English
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