Structural properties of hydrogenated carbon-nitride films produced by ion-beam-assisted evaporation of the molecular precursor C{sub 4}N{sub 6}H{sub 4}
Hydrogenated carbon-nitride films (CN{sub x}:H) were deposited by evaporation of aza-adenine (8-aza-6-aminopurine, C{sub 4}N{sub 6}H{sub 4}) and irradiated during film growth by a nitrogen ion beam with energies of 25, 50, and 100 eV. The relationship between the deposition conditions and the chemical bonding structure was investigated by x-ray photoelectron and infrared spectroscopies. The mass density of the films was estimated from the C1s plasmon energy and the optical properties were examined by ultraviolet{endash}visible spectroscopy. The infrared spectra indicate that in the case of evaporated films, the molecular structure of aza-adenine is preserved without substantial nitrogen loss (N/C{approximately}1.3). With increasing energy of the assisting nitrogen ion beam, the structure is subsequently transformed into an amorphous phase. This transition is accompanied by an increasing nitrogen loss down to N/C{approximately}0.8, a decrease of the optical band gap, and an increase of the film density. The known molecular structure of aza-adenine permits the reconstruction of the C1s and N 1s core-level spectra with deconvoluted spectral components representing the different bonding environments of C and N atoms present in the molecule. The spectral components are identified by comparing the experimental data with theoretical calculations of the corresponding binding energies. By analysis of the spectral changes induced by the nitrogen ion beam with increasing energies, it is possible to study the microstructural modifications of the material. {copyright} 2001 American Institute of Physics.
- Sponsoring Organization:
- (US)
- OSTI ID:
- 40204191
- Journal Information:
- Journal of Applied Physics, Vol. 89, Issue 12; Other Information: DOI: 10.1063/1.1372371; Othernumber: JAPIAU000089000012007852000001; 093112JAP; PBD: 15 Jun 2001; ISSN 0021-8979
- Publisher:
- The American Physical Society
- Country of Publication:
- United States
- Language:
- English
Similar Records
Characterization of carbon nitride films produced by pulsed laser deposition
Zirconium nitride films deposited in (Ar + N{sub 2} + H{sub 2}) sputtering atmosphere: Optical, structural, and electrical properties