Precision manufacturing using LIGA
- Center for X-ray Optics, Lawrence Berkeley Laboratory, Berkeley, CA 94720 (United States)
- Materials Synthesis Department, Sandia National Laboratory, Livermore, CA 94551 (United States)
- Center for Space Microelectronics Technology, Jet Propulsion Laboratory, Pasadena, CA 91109-8099 (United States)
Our objective is the fabrication of small high-precision parts using LIGA, which can be used in a variety of industrial applications. LIGA is a combination of deep x-ray lithography, electroplating, and replication processes that enables the fabrication of microstructures with vertical dimensions several millimeters high, lateral dimensions in the micrometer range, and submicron tolerances. On beamline 10.3.2, at the Advanced Light Source (ALS), the Center for X-ray Optics (CXRO) has built an end station suitable for LIGA. The ALS is an excellent source of radiation for this application. The CXRO, in close collaboration with Sandia National Laboratory and the Jet Propulsion Laboratory, has developed the other essential process steps of mask making, resist development, x-ray exposure, and electroplating. This technology provides a powerful tool for mass production and miniaturization of mechanical systems into a dimensional regime not accessible by traditional manufacturing operations. We will present several applications that exploit the characteristics of the LIGA process: the fabrication of magnetic laminations for a high precision stepping motor; miniature octopole lens for advanced e-beam lithography; high-aspect-ratio x-ray collimating grids for astronomy; and microscopic tumblers for nuclear security. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 389552
- Report Number(s):
- CONF-9510119--
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 9 Vol. 67; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
Similar Records
Formation of complex ceramic miniaturized structures by pyrolysis of poly(vinylsilazane)
LIGA Micromachining: Infrastructure Establishment