Remote infrared radiation detection using piezoresistive microcantilevers
- Health Sciences Research Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one ({lt}ms) and a slower one ({approximately}10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be {approximately}70 nW/Hz{sup 1/2}. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors. {copyright} {ital 1996 American Institute of Physics.}
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-96OR22464
- OSTI ID:
- 389235
- Journal Information:
- Applied Physics Letters, Vol. 69, Issue 20; Other Information: PBD: Nov 1996
- Country of Publication:
- United States
- Language:
- English
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