Micro-strip gas counter on a membrane substrate
- Lawrence Berkeley Laboratory, CA (United States)
We describe how to build a Micro-Strip Gas Counter (MSGC) on very thin Si nitride membrane with micro-fabrication techniques. To develop the MSGC for intermediate tracking in future collider experiments, it is desirable to reduce the substrate thickness to minimize the effect of multiple scattering. A thin film of 0.5{mu}m low-stress Si nitride is first deposited on both sides of a 4 inch wafer of P(100) Si. A 1 inch square membrane of 10 {mu}m thickness is formed by wet-etching in KOH solution on the back side. On the front side, a 1{mu}m Al layer is coated. Using standard photolithography and plasma-etching techniques, we fabricate a MSGC which consists of alternating 10{mu}m wide anode strips and 90{mu}m wide cathode strips with a 200{mu}m anode-to-anode pitch. We then test the MSGC in an Ar-CH{sub 4} gas mixture (90:10) at atmospheric pressure with an {sup 55}Fe X-ray source. Its performance in terms of energy resolution and gain stability will be presented.
- OSTI ID:
- 387152
- Report Number(s):
- CONF-931044-; ISSN 0003-0503; TRN: 96:027094
- Journal Information:
- Bulletin of the American Physical Society, Vol. 38, Issue 9; Conference: Fall meeting of the Division of Nuclear Physics of the American Physical Society, Pacific Grove, CA (United States), 20-23 Oct 1993; Other Information: PBD: Oct 1993
- Country of Publication:
- United States
- Language:
- English
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