Micro-strip gas counter on a membrane substrate

Journal Article · Fri Oct 01 04:00:00 EDT 1993 · Bulletin of the American Physical Society

OSTI ID:387152

Gong, W C; Wieman, H; Harris, J W; Mitchell, J T ^[1]

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1. Lawrence Berkeley Laboratory, CA (United States)

We describe how to build a Micro-Strip Gas Counter (MSGC) on very thin Si nitride membrane with micro-fabrication techniques. To develop the MSGC for intermediate tracking in future collider experiments, it is desirable to reduce the substrate thickness to minimize the effect of multiple scattering. A thin film of 0.5{mu}m low-stress Si nitride is first deposited on both sides of a 4 inch wafer of P(100) Si. A 1 inch square membrane of 10 {mu}m thickness is formed by wet-etching in KOH solution on the back side. On the front side, a 1{mu}m Al layer is coated. Using standard photolithography and plasma-etching techniques, we fabricate a MSGC which consists of alternating 10{mu}m wide anode strips and 90{mu}m wide cathode strips with a 200{mu}m anode-to-anode pitch. We then test the MSGC in an Ar-CH{sub 4} gas mixture (90:10) at atmospheric pressure with an {sup 55}Fe X-ray source. Its performance in terms of energy resolution and gain stability will be presented.

• OSTI ID: 387152
• Report Number(s): CONF-931044--
• Journal Information: Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 9 Vol. 38; ISSN 0003-0503; ISSN BAPSA6
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
COLLIDING BEAMS
DESIGN
ENERGY RESOLUTION
GAS SCINTILLATION DETECTORS
SILICON NITRIDES