Contamination and uniformity control in plasma processing tools
This is the final report of a one-year, Laboratory-Directed Research and Development (LDRD) project at the Los Alamos National Laboratory (LANL). We have collaborated with industry to build a laboratory to study plasma processing, a surface-cleaning technique that uses short-lived, gaseous reactants in place of chemical solvents. We have performed experiments and developed computer models to understand how complex substrate geometries affect plasma electrical properties and to demonstrate the feasibility of generating metastable molecular oxygen in a plasma.
- Research Organization:
- Los Alamos National Lab., NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 381774
- Report Number(s):
- LA-UR--96-3220; ON: DE97000304
- Country of Publication:
- United States
- Language:
- English
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