Contoured inner after-heater shield for reducing stress in growing crystalline bodies
An apparatus for growing hollow crystalline bodies by the EFG process, comprising an EFG die having a top surface shaped for growing a hollow crystalline body having a cross-sectional configuration in the shape of a polygon having n faces, and a radiation shield adjacent to and surrounded by the top end surface of the die, characterized in that the shield has an inner edge defining a similar polygon with n sides, and the inner edge of the shield is notched so that the spacing between the n faces and the n sides is greatest between the central portions of the n faces and the n sides, whereby the greater spacing at the central portions helps to reduce lateral temperature gradients in the crystalline body that is grown by use of the die. 4 figs.
- Assignee:
- ASE Americas, Inc., Billerica, MA (United States)
- Patent Number(s):
- US 5,558,712/A/
- Application Number:
- PAN: 8-334,753
- OSTI ID:
- 378142
- Resource Relation:
- Other Information: PBD: 24 Sep 1996
- Country of Publication:
- United States
- Language:
- English
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