Dual beam optical system for pulsed laser ablation film deposition
Patent
·
OSTI ID:378140
A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target. 3 figs.
- Research Organization:
- Lockheed Martin Energy Syst Inc
- DOE Contract Number:
- AC05-84OR21400
- Assignee:
- Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
- Patent Number(s):
- US 5,558,788/A/
- Application Number:
- PAN: 8-159,163
- OSTI ID:
- 378140
- Country of Publication:
- United States
- Language:
- English
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