Uniform and large area deposition of diamond-like carbon using RF source ion beam

Book · Sun Dec 31 00:00:00 EST 1995

OSTI ID:375923

Wu, R L.C.; Lanter, W ^[1]; Miyoshi, K; Heidger, S L ^[2]; Bletzinger, P; Garscadden, A ^[3]

---

1. UES, Inc., Dayton, OH (United States)
2. NASA Lewis Research Center, Cleveland, OH (United States)
3. Wright Lab., Wright-Patterson AFB, OH (United States)

The authors have designed and constructed a large area ion beam apparatus to deposit DLC films onto 1,000 cm{sup 2} surfaces with various geometries. The use of an efficient RF excited ion gun (13.56 MHz, 1 kW power, 50--3,000 eV ion energy) with a diameter of 20 cm, enables one to generate various hydrocarbon ions with high ion beam currents, varying ionic species and less maintenance. The use of a four axis (X-Y-{theta}Y-{theta}Z) substrate scanner with computer control can produce uniform DLC films on large areas and curved surfaces. The effects of RF power, ion energy, gaseous composition, and total pressure on the properties of DLC have been systematically investigated.

• OSTI ID: 375923
• Report Number(s): CONF-941144-; ISBN 1-55899-255-3; TRN: IM9642%%11
• Resource Relation: Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 28 Nov - 9 Dec 1994; Other Information: PBD: 1995; Related Information: Is Part Of Beam-solid interactions for materials synthesis and characterization; Jacobson, D.C. [ed.] [AT and T Bell Labs., Murray Hill, NJ (United States)]; Luzzi, D.E. [ed.] [Univ. of Pennsylvania, Philadelphia, PA (United States)]; Heinz, T.F. [ed.] [Columbia Univ., New York, NY (United States)]; Iwaki, Masaya [ed.] [Inst. of Physical and Chemical Research, Wako, Saitama (Japan)]; PB: 763 p.; Materials Research Society symposium proceedings, Volume 354
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
ENERGY BEAM DEPOSITION
IONIC COMPOSITION
COMPUTERIZED CONTROL SYSTEMS
PROCESS CONTROL
EXPERIMENTAL DATA