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Title: Phase shifting diffraction interferometer

Abstract

An interferometer which has the capability of measuring optical elements and systems with an accuracy of {lambda}/1000 where {lambda} is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about {lambda}/50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms. 8 figs.

Inventors:
Publication Date:
Research Org.:
University of California
OSTI Identifier:
372585
Patent Number(s):
US 5,548,403/A/
Application Number:
PAN: 8-345,878
Assignee:
Univ. of California, Oakland, CA (United States) PTO; SCA: 440600; PA: EDB-96:145101; SN: 96001644977
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 29 Aug 1996
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; INTERFEROMETERS; DESIGN; OPTICAL SYSTEMS; VISIBLE RADIATION; SIGNAL-TO-NOISE RATIO; DATA ANALYSIS

Citation Formats

Sommargren, G.E. Phase shifting diffraction interferometer. United States: N. p., 1996. Web.
Sommargren, G.E. Phase shifting diffraction interferometer. United States.
Sommargren, G.E. Thu . "Phase shifting diffraction interferometer". United States.
@article{osti_372585,
title = {Phase shifting diffraction interferometer},
author = {Sommargren, G.E.},
abstractNote = {An interferometer which has the capability of measuring optical elements and systems with an accuracy of {lambda}/1000 where {lambda} is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about {lambda}/50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Aug 29 00:00:00 EDT 1996},
month = {Thu Aug 29 00:00:00 EDT 1996}
}