SEM analysis of oxide thin films and reactions
Journal Article
·
· Journal of the American Ceramic Society
- Univ. of Minnesota, Minneapolis, MN (United States). Dept. of Chemical Engineering and Material Science
- Sandia National Labs., Albuquerque, NM (United States). Materials Characterization Dept.
The determination of orientation relationships between thin oxide films and the underlying single-crystal oxide substrates using electron backscattered diffraction (EBSD) in scanning electron microscopy (SEM) is discussed. In these well-defined systems, complementary information concerning the local chemistry can be obtained using high-resolution backscattered electron (BSE) imaging. Recent studies have shown the value of using EBSD patterns (EBSPs) in SEM.
- Research Organization:
- Sandia National Laboratory
- Sponsoring Organization:
- Los Alamos National Lab., NM (United States); Sandia National Labs., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 361718
- Journal Information:
- Journal of the American Ceramic Society, Journal Name: Journal of the American Ceramic Society Journal Issue: 6 Vol. 82; ISSN 0002-7820; ISSN JACTAW
- Country of Publication:
- United States
- Language:
- English
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