Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations

Journal Article · Wed Mar 31 23:00:00 EST 1999 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.123722· OSTI ID:335567

Freund, L B ^[1]; Floro, J A ^[2]; Chason, E ^[1]

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1. Division of Engineering, Brown University, Providence, Rhode Island 02912 (United States)
2. Sandia National Laboratories, Albuquerque, New Mexico 87185-1415 (United States)

Two main assumptions which underlie the Stoney formula relating substrate curvature to mismatch strain in a bonded thin film are that the film is very thin compared to the substrate, and the deformations are infinitesimally small. Expressions for the curvature{endash}strain relationship are derived for cases in which these assumptions are relaxed, thereby providing a basis for interpretation of experimental observations for a broader class of film{endash}substrate configurations. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 335567
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 14 Vol. 74; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
DEFORMATION
ELASTICITY
INTERFACES
RESIDUAL STRESSES
STRAINS
SUBSTRATES
THICKNESS
THIN FILMS