Virtual mask digital electron beam lithography
Systems and methods for direct-to-digital holography are described. An apparatus includes a laser; a beamsplitter optically coupled to the laser; a reference beam mirror optically coupled to the beamsplitter; an object optically coupled to the beamsplitter, a focusing lens optically coupled to both the reference beam mirror and the object; and a digital recorder optically coupled to the focusing lens. A reference beam is incident upon the reference beam mirror at a non-normal angle, and the reference beam and an object beam are focused by the focusing lens at a focal plane of the digital recorder to form an image. The systems and methods provide advantages in that computer assisted holographic measurements can be made. 5 figs.
- Research Organization:
- Lockheed Martin Energy Research Corporation
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-96OR22464
- Assignee:
- Lockheed Martin Energy Research Corp., Oak Ridge, TN (United States)
- Patent Number(s):
- US 5,892,231/A/
- Application Number:
- PAN: 8-795,003
- OSTI ID:
- 335477
- Country of Publication:
- United States
- Language:
- English
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