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Title: Porous silicon structures with high surface area/specific pore size

Abstract

Fabrication and use of porous silicon structures to increase surface area of heated reaction chambers, electrophoresis devices, and thermopneumatic sensor-actuators, chemical preconcentrates, and filtering or control flow devices. In particular, such high surface area or specific pore size porous silicon structures will be useful in significantly augmenting the adsorption, vaporization, desorption, condensation and flow of liquids and gases in applications that use such processes on a miniature scale. Examples that will benefit from a high surface area, porous silicon structure include sample preconcentrators that are designed to adsorb and subsequently desorb specific chemical species from a sample background; chemical reaction chambers with enhanced surface reaction rates; and sensor-actuator chamber devices with increased pressure for thermopneumatic actuation of integrated membranes. Examples that benefit from specific pore sized porous silicon are chemical/biological filters and thermally-activated flow devices with active or adjacent surfaces such as electrodes or heaters. 9 figs.

Inventors:
; ;
Publication Date:
Research Org.:
University of California
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
335452
Patent Number(s):
US 5,882,496/A/
Application Number:
PAN: 8-807,152
Assignee:
Univ. of California, Oakland, CA (United States) PTO; SCA: 360600; 426000; PA: EDB-99:046238; SN: 99002077346
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 16 Mar 1999
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; SILICON; POROUS MATERIALS; SURFACE AREA; CHEMICAL REACTORS; SEPARATION EQUIPMENT; MONITORS; FLOWMETERS; MINIATURIZATION; FABRICATION; USES

Citation Formats

Northrup, M.A., Yu, C.M., and Raley, N.F. Porous silicon structures with high surface area/specific pore size. United States: N. p., 1999. Web.
Northrup, M.A., Yu, C.M., & Raley, N.F. Porous silicon structures with high surface area/specific pore size. United States.
Northrup, M.A., Yu, C.M., and Raley, N.F. Tue . "Porous silicon structures with high surface area/specific pore size". United States.
@article{osti_335452,
title = {Porous silicon structures with high surface area/specific pore size},
author = {Northrup, M.A. and Yu, C.M. and Raley, N.F.},
abstractNote = {Fabrication and use of porous silicon structures to increase surface area of heated reaction chambers, electrophoresis devices, and thermopneumatic sensor-actuators, chemical preconcentrates, and filtering or control flow devices. In particular, such high surface area or specific pore size porous silicon structures will be useful in significantly augmenting the adsorption, vaporization, desorption, condensation and flow of liquids and gases in applications that use such processes on a miniature scale. Examples that will benefit from a high surface area, porous silicon structure include sample preconcentrators that are designed to adsorb and subsequently desorb specific chemical species from a sample background; chemical reaction chambers with enhanced surface reaction rates; and sensor-actuator chamber devices with increased pressure for thermopneumatic actuation of integrated membranes. Examples that benefit from specific pore sized porous silicon are chemical/biological filters and thermally-activated flow devices with active or adjacent surfaces such as electrodes or heaters. 9 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {3}
}