Cathodic-arc plasma density, radial profile, and total plasma inventory as measured by microwave interferometer and Faraday cup

Journal Article · Tue Dec 01 04:00:00 EST 1998 · IEEE Transactions on Plasma Science

DOI:https://doi.org/10.1109/27.747891· OSTI ID:321020

Wood, B P ^[1]; Pesenson, D ^[2]

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1. Los Alamos National Lab., NM (United States)
2. Univ. of California, Irvine, CA (United States)

The total amount of plasma, peak plasma density, and plasma density radial profile are derived from a series of measurements of ion current density (with a Faraday cup) and integrated electron line density (with a microwave interferometer) for a cathodic arc derived plasma. Comparisons are made between cathode material (erbium and titanium), arc current, background gas pressure, and the presence or absence of a series magnetic solenoid around the coaxial anode and cathode. The work reported here was inspired by the authors` efforts to deposit coatings of erbium oxide and titanium nitride for wear and corrosion resistance.

• Sponsoring Organization: USDOE, Washington, DC (United States)
• OSTI ID: 321020
• Journal Information: IEEE Transactions on Plasma Science, Journal Name: IEEE Transactions on Plasma Science Journal Issue: 6 Vol. 26; ISSN ITPSBD; ISSN 0093-3813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CATHODES
CHEMICAL REACTORS
ELECTRIC DISCHARGES
ERBIUM OXIDES
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA RADIAL PROFILES
SURFACE COATING
TITANIUM NITRIDES