Influence of hydrogen on optical properties of LPCVD amorphous silicon films
Book
·
OSTI ID:304347
- Warsaw Univ. of Technology (Poland). Inst. of Microelectronics and Optoelectronics
- Kyung Hee Univ., Seoul (Korea, Republic of). Dept. of Physics
The dependence of different optical parameters such as refractive index (n), optical absorption coefficient (a), slope of Tauc plot (C), optical band gap (E{sub G}), dispersion energy (E{sub d}), average excitation energy (E{sub 0}), static refractive index (n{sub 0}) on hydrogen content is reported in this paper. It was found that these parameters significantly dependence on hydrogen concentration in LPCVD amorphous silicon films.
- OSTI ID:
- 304347
- Report Number(s):
- CONF-970953-; TRN: IM9905%%39
- Resource Relation:
- Conference: 26. IEEE photovoltaic specialists conference, Anaheim, CA (United States), 29 Sep - 3 Oct 1997; Other Information: PBD: 1997; Related Information: Is Part Of Conference record of the twenty sixth IEEE photovoltaic specialists conference -- 1997; PB: 1477 p.
- Country of Publication:
- United States
- Language:
- English
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