Update on synchrotron radiation TXRF: New results
Conference
·
OSTI ID:302411
- Stanford Univ., CA (United States). Stanford Synchrotron Radiation Lab.; and others
Synchrotron-based total-reflection x-ray fluorescence (SR-TXRF) has been developed as a leading technique for measuring wafer cleanliness. It holds advantages over other techniques in that it is non-destructive and allows mapping of the surface. The highest sensitivity observed thus far is 3 {times} 10{sup 8} atoms/cm{sup 2} ({approx} 3fg) for 1,000 second count time. Several applications of SR-TXRF are presented which take advantage of the energy tunability of the synchrotron source or the mapping capability.
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC03-76SF00515
- OSTI ID:
- 302411
- Report Number(s):
- CONF-980405--
- Country of Publication:
- United States
- Language:
- English
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