Theory of magnetized, coupled, rf-driven plasma sheaths in one dimension

Journal Article · Fri Jan 01 04:00:00 EST 1999 · Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

DOI:https://doi.org/10.1103/PhysRevE.59.1111· OSTI ID:295533

Riyopoulos, S ^[1]

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1. Science Applications International Corporation, McLean, Virginia 22102 (United States)

A set of equations for magnetized plasma sheaths in rf capacitance discharges is developed within the adiabatic electron, fluid ion framework. It differs from previous approaches in that (a) ion demagnetization, i.e., the detachment of the ion flow from the magnetic lines caused by electrostatic gradients, is introduced self-consistently, (b) the ion injection velocity from the presheath is reevaluated to ensure the ion-electron flux balance, and (c) two symmetrically opposed coupled sheaths are driven by a sinusoidal driving voltage instead of a sinusoidal current. It is found that the sheath potential and thickness increase considerably with increasing magnetic inclination {theta} relative to the electric field compared to the unmagnetized results; the latter are recovered at the parallel magnetic field limit. Also, the ion injection velocity along the magnetic lines is subsonic and depends on the magnetic inclination. Finally, a sinusoidal ac voltage drives an anharmonic sheath current, while a sinusoidal current drives anharmonic voltage. {copyright} {ital 1999} {ital The American Physical Society}

• OSTI ID: 295533
• Journal Information: Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics, Journal Name: Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics Journal Issue: 1 Vol. 59; ISSN 1063-651X; ISSN PLEEE8
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CAPACITORS
DEMAGNETIZATION
ELECTRIC DISCHARGES
ELECTRIC FIELDS
HIGH-FREQUENCY DISCHARGES
PLASMA SHEATH