Failure modes in surface micromachined microelectromechanical actuators

Conference · Sat Feb 28 23:00:00 EST 1998

OSTI ID:292867

Miller, S L; Rodgers, M S; LaVigne, G; Sniegowski, J J; Clews, P; Tanner, D M; Peterson, K A

In order for the rapidly emerging field of MicroElectroMechanical Systems (MEMS) to meet its extraordinary expectations regarding commercial impact, issues pertaining to how they fail must be understood. The authors identify failure modes common to a broad range of MEMS actuators, including adhesion (stiction) and friction induced failures caused by improper operational methods, mechanical instabilities, and electrical instabilities. Demonstrated methods to mitigate these failure modes include implementing optimized designs, model based operational methods, and chemical surface treatments.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 292867
• Report Number(s): SAND--98-0382C; CONF-980320--; ON: DE98003046
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ACTUATORS
ENGINES
FAILURES
HYBRID SYSTEMS
MICROELECTRONIC CIRCUITS
RELIABILITY
SYSTEMS ANALYSIS