Formation of pre-sheath boundary layers in electronegative plasmas

Title: Formation of pre-sheath boundary layers in electronegative plasmas

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Abstract

In electronegative plasmas Coulomb scattering between positive and negative ions can lead to the formation of a pre-sheath boundary layer containing the bulk of the negative ions. The negative ion boundary layer forms when momentum transfer from positive to negative ions dominates the negative ion acceleration from the electric field. This condition is met in Inductively Coupled Plasma reactors that operate at low pressure and high plasma density. Simulations of the GEC reactor for Chlorine and Oxygen chemistries using the INDUCT95 2D model are presented showing the pre-sheath boundary layer structure as a function of applied power and neutral pressure.

Authors:: Vitello, P., LLNL

Publication Date:: 1998-05-01

Research Org.:: Lawrence Livermore National Lab., CA (United States)

Sponsoring Org.:: USDOE, Washington, DC (United States)

OSTI Identifier:: 289119

Report Number(s):: UCRL-JC-130709; CONF-980597-
ON: DE98058883; BR: DP0101031

DOE Contract Number:: W-7405-ENG-48

Resource Type:: Conference

Resource Relation:: Conference: 4. international workshop on advanced plasma tools process engineering, Millbrae, CA (United States), 26-27 May 1998; Other Information: PBD: 1 May 1998

Country of Publication:: United States

Language:: English

Subject:: 70 PLASMA PHYSICS AND FUSION; ELECTRONEGATIVITY; PLASMA; BOUNDARY LAYERS; PLASMA SIMULATION; COULOMB SCATTERING; MOMENTUM TRANSFER

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                    Vitello, P., LLNL. Formation of pre-sheath boundary layers in electronegative plasmas.  United States: N. p., 1998. 
        Web.

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                    Vitello, P., LLNL. Formation of pre-sheath boundary layers in electronegative plasmas.  United States.

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                    Vitello, P., LLNL. Fri .  
        "Formation of pre-sheath boundary layers in electronegative plasmas".  United States.  https://www.osti.gov/servlets/purl/289119.

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@article{osti_289119,

  title        = {Formation of pre-sheath boundary layers in electronegative plasmas},

  author       = {Vitello, P., LLNL},

  abstractNote = {In electronegative plasmas Coulomb scattering between positive and negative ions can lead to the formation of a pre-sheath boundary layer containing the bulk of the negative ions. The negative ion boundary layer forms when momentum transfer from positive to negative ions dominates the negative ion acceleration from the electric field. This condition is met in Inductively Coupled Plasma reactors that operate at low pressure and high plasma density. Simulations of the GEC reactor for Chlorine and Oxygen chemistries using the INDUCT95 2D model are presented showing the pre-sheath boundary layer structure as a function of applied power and neutral pressure.},

  doi          = {},

  url          = {https://www.osti.gov/biblio/289119},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1998},

  month        = {5}

}

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