Formation of pre-sheath boundary layers in electronegative plasmas
Conference
·
OSTI ID:289119
In electronegative plasmas Coulomb scattering between positive and negative ions can lead to the formation of a pre-sheath boundary layer containing the bulk of the negative ions. The negative ion boundary layer forms when momentum transfer from positive to negative ions dominates the negative ion acceleration from the electric field. This condition is met in Inductively Coupled Plasma reactors that operate at low pressure and high plasma density. Simulations of the GEC reactor for Chlorine and Oxygen chemistries using the INDUCT95 2D model are presented showing the pre-sheath boundary layer structure as a function of applied power and neutral pressure.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 289119
- Report Number(s):
- UCRL-JC-130709; CONF-980597-; ON: DE98058883; BR: DP0101031
- Resource Relation:
- Conference: 4. international workshop on advanced plasma tools process engineering, Millbrae, CA (United States), 26-27 May 1998; Other Information: PBD: 1 May 1998
- Country of Publication:
- United States
- Language:
- English
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