Crystallization behavior and improved properties for sol-gel derived PZT and PLZT thin layers processed with a lead oxide cover coating
- Toyota Central Research and Development Labs., Aichi (Japan)
- Univ. of Illinois, Urbana, IL (United States)
Improved dielectric and ferroelectric properties are reported for the sol-gel preparation of lead-based perovskite-structure thin layers by a novel processing technique. The method uses a PbO cover coat to avoid the formation of additional phases on the surface. The deleterious effect of a {open_quotes}pyrochlore-type{close_quotes} phase, which is not present when a PbO cover coat is used, is attributed to PbO loss from the surface during thermal processing. Examples are given for PZT and PLZT thin layers integrated on Si with and without a PbO cover coat. Crystallization temperatures and times were reduced for the attainment of single-phase perovskite material. The dielectric, ferroelectric, and piezoelectric properties were always found to be superior for coated structures.
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 28827
- Report Number(s):
- CONF-931142--
- Country of Publication:
- United States
- Language:
- English
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