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Deposition and dielectric property of ion-beam assisted bismuth titanate film

Conference ·
OSTI ID:28823
;  [1]
  1. Syracuse Univ., NY (United States)

Thin films of bismuth titanate (Bi{sub 4}Ti{sub 3}O{sub 12}) have been prepared on different substrates by ion-beam sputtering technique. These films were deposited using a Bi(bismuth)-rich Bi{sub 4}Ti{sub 3}O{sub 12} ceramic target. Films were deposited with substrate temperatures ranging from 320{degrees}C to 550{degrees}C. We observed that the dielectric behavior of the deposited films strongly depends on the deposition parameters (such as the substrate temperature, sputter gas mixture, etc.). Results, also, indicate that films deposited at substrate temperature of about 450{degrees}C have dielectric property comparable to that of single crystal bismuth titanate.

OSTI ID:
28823
Report Number(s):
CONF-931142--
Country of Publication:
United States
Language:
English