Field emission characteristics of transition-metal nitrides
Journal Article
·
· Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
- Department of Electrical and Electronic Engineering, Muroran Institute of Technology, 27-1 Mizumoto-cho Muroran, Hokkaido 050 (Japan)
Transition-metal nitrides seem to have good field emission characteristics, but their field emission properties are not well known. NbN, Nb{sub 2}N, TiN, and ZrN emitters were fabricated by nitriding elemental metal needles. These nitride field emitters gave step- and spikelike current fluctuations. The NbN emitters, which had been flash heated at 900{degree}C, showed the most stable field emission current among the nitride emitters examined. {copyright} {ital 1996 American Vacuum Society}
- OSTI ID:
- 288177
- Report Number(s):
- CONF-9507110-; ISSN 0734-211X; TRN: 9612M0069
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 14, Issue 3; Conference: 8. international vacuum microelectronics conference, Portland, OR (United States), 30 Jul - 3 Aug 1995; Other Information: PBD: May 1996
- Country of Publication:
- United States
- Language:
- English
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