The use of {open_quote}{open_quote}mixed{close_quote}{close_quote} beams in microprobe imaging
Journal Article
·
· Review of Scientific Instruments
- School of Physics, Microanalytical Research Centre (MARC), The University of Melbourne, Parkville 3052 (Australia)
This article will demonstrate the production and application of {open_quote}{open_quote}mixed{close_quote}{close_quote} beams for a magnetically focused nuclear microprobe. A {open_quote}{open_quote}mixed{close_quote}{close_quote} beam is defined as any two beams of ions of different species, or energy, or both that can be quickly and easily made to have the same magnetic rigidity ({ital R}{sub {ital m}}) so that they transport, focus, and scan the same in a magnetic nuclear microprobe. Two techniques for the production of such beams will be presented. These methods include the extraction of different ions from the same source and scanning the terminal potential to produce the same {ital R}{sub {ital m}}, and the use of a postacceleration stripper to change the charge state of one ion species to give it the same {ital R}{sub {ital m}} as another ion species. The application of mixed beams to ion beam induced charge, scanning transmission ion microscopy, and ion microlithography will also be presented. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 286881
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 8 Vol. 67; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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