Progress in the understanding of non-1D glow discharges: experiment and theory
- Laboratoire de Spectrometrie Physique (UA CNRS 08), Universite Joseph Fourier (Grenoble-I), BP 87, 38402 Saint Martin d`Heres (France)
- Centre de Physique des Plasmas et Applications de Toulouse (UA CNRS 277), Universite Paul Sabatier, 31062 Toulouse (France)
This contribution is a joint presentation on the structure of non unidimensional glow discharges experimentally observed using in particular optical diagnostics and predicted using self consistent numerical models. Results are presented concerning the effect of radial losses and electrode edges on the structure of DC and RF glow discharges, and the inititation phase of the breakdown in planar hollow cathode discharges. Most of the observed features of the discharges can be well reproduced by the models, which thus can be used to predict the effect of geometry on plasma devices and guide the optimization of their design. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 285336
- Report Number(s):
- CONF-950749--
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 363; ISSN 0094-243X; ISSN APCPCS
- Country of Publication:
- United States
- Language:
- English
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