Electrochemical synthesis of ceramic materials. 4. Electrophoretic deposition of metal nitride ceramic precursors
- Texas A&M Univ., College Station, TX (United States)
The authors have prepared metal nitride ceramic precursors by anodic dissolution of the corresponding metal in liquid NH{sub 3} electrolyte solutions and then deposited coatings of these precursors onto n-Si substrates by electrophoresis. X-ray diffraction and electron microscopy indicate that calcination of the precursor-coated substrates yields coatings of AlN, {delta}-NbN, and Ni{sub 3}N. Precursor coatings are formed by applying fields greater than 10V/cm between electrodes in a CH{sub 3}CN suspension of the precursor. The positively charged precursor particles deposit selectively on the cathode. Subsequent calcination in flowing NH{sub 3} or Ar yields the metal nitride coating. The Ni{sub 3}N coating was prepared by calcining the precursor at 375 {degrees}C in NH{sub 3}, while the AlN and NbN precursor coatings were prepared by calcination at 1100 {degrees}C in NH{sub 3} and 800 {degrees}C in Ar, respectively. 30 refs., 4 figs.
- OSTI ID:
- 285032
- Journal Information:
- Chemistry of Materials, Journal Name: Chemistry of Materials Journal Issue: 4 Vol. 8; ISSN CMATEX; ISSN 0897-4756
- Country of Publication:
- United States
- Language:
- English
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