Infrared reflection of GaN and AlGaN thin film heterostructures with AlN buffer layers
- Lawrence Berkeley Laboratory and University of California, Berkeley, California 94720 (United States)
- Department of Electrical and Electronic Engineering, Meijo University, Nagoya (Japan)
Infrared reflection spectroscopy is applied to state-of-the-art thin film heterostructures of group-III nitrides on sapphire and Si substrates. The individual layers of GaN and AlGaN and the AlN buffer layer are identified by their phonon frequencies. Under non-perpendicular incidence of the light, A{sub 1}(LO) phonon modes are observed in the wurtzite system. The presence of the very thin AlN buffer layer manifests itself in clear features of the AlN phonons. The A{sub 1}(LO) phonon mode energy is determined in Al{sub {ital x}}Ga{sub 1{minus}{ital x}}N for {ital x}{approx_equal}0.15. Raman spectra confirm our findings. {copyright} {ital 1996 American Institute of Physics.}
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 283785
- Journal Information:
- Applied Physics Letters, Vol. 68, Issue 18; Other Information: PBD: Apr 1996
- Country of Publication:
- United States
- Language:
- English
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