Surface Debye temperature measurement with reflection high-energy electron diffraction
- Department of Electrical and Computer Engineering, Physical Electronics Research Institute, Old Dominion University, Norfolk, Virginia 23529-0246 (United States)
Measurement of the surface mean-square atomic vibrational amplitude, or equivalently the surface Debye temperature, with reflection high-energy electron diffraction is discussed. Low-index surfaces of lead are used as examples. Particular details are given about the temperature-dependent diffraction pattern of Pb(100) in the Debye{endash}Waller region. The use of reflection high-energy electron diffraction for measurement of the substrate surface temperature in thin-film deposition chambers is suggested. {copyright} {ital 1996 American Institute of Physics.}
- DOE Contract Number:
- FG05-93ER45505
- OSTI ID:
- 283421
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 9 Vol. 79; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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