Texture in magnetic annealed Terfenol-D films
- Department of Metallurgical Engineering, University of Utah, Salt Lake City, Utah 84112 (United States)
The paper will present an approach to obtaining (111) textured Terfenol-D films suitable for use in magnetostrictive devices. Amorphous thin films of Terfenol-D were rf magnetron sputter deposited on (100) silicon single crystal substrates. A composite target was used to obtain the Terfenol-D films. Samples were subsequently annealed in the range of 300 to 600{degree}C in the presence of a 2000 Oe magnetic field for times of 15 min to 1 h. X-ray diffraction studies were performed using a Siemens D5000 diffractometer to examine the changes in the preferred crystalline orientation in films with changes in annealing time, annealing temperature, and field orientation. The magnetic properties were examined using a Micromag 2900 alternating gradient magnetometer. Magnetic annealing at 450{degree}C showed the best combination of magnetic properties. The films exhibited in-plane {ital H}{sub {ital c}} values in the range of near zero to 350 Oe and {ital M}{sub {ital s}} values in the range of 200 to 550 emu/cc. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 282080
- Report Number(s):
- CONF-951101--
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 79; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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