Crystallographic texture in cubic boron nitride thin films

Journal Article · Sun Mar 31 23:00:00 EST 1996 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.361381· OSTI ID:279726

Medlin, D L; Friedmann, T A; Mirkarimi, P B; Cardinale, G F; McCarty, K F ^[1]

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1. Sandia National Laboratories, Livermore, California 94551 (United States)

We examine the crystallographic texture exhibited by cubic boron nitride (cBN) in thin films grown by ion-assisted deposition. Our analysis indicates that the cBN is preferentially oriented such that individual crystallites have at least one [111] direction lying in the plane of the film but are otherwise randomly oriented about (1) the substrate normal and (2) the in-plane cBN [111] axis. This preferential orientation is consistent with an alignment between the cBN {l_brace}111{r_brace} planes and the basal planes of the layer of highly oriented graphitic boron nitride that forms in the initial stages of film growth. {copyright}{ital 1996 American Institute of Physics.}

• Research Organization: Sandia National Laboratory
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 279726
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 7 Vol. 79; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALKYLATING AGENTS
BORON NITRIDES
CUBIC LATTICES
ELECTRON DIFFRACTION
ELECTRON MICROSCOPY
ENERGY BEAM DEPOSITION FILMS
ION BEAMS
NUCLEATION
STRUCTURAL CHEMICAL ANALYSIS
TEXTURE