Characterization of titanium and glass interfacial reactions using a novel XPS procedure
- Lehigh Univ., Bethlehem, PA (United States); and others
The initial stages of reaction between titanium and SiO{sub 2} or Na{sub 2}O{center_dot}2SiO{sub 2} glass were studied in a novel way by X-ray photoelectron spectroscopy (XPS) in a Scienta ESCA-300 spectrometer using monochromatic AlK{alpha} radiation. Each glass was fractured inside the XPS analysis chamber where a base pressure of <5 x 10{sup -9} torr was maintained. The specimens were then transferred to another chamber coupled to the XPS chamber where approximately 5 nm of titanium was deposited on the fractured surface under a vacuum of 2 x 10{sup -8} torr. The glass substrates with the deposited film were then heated inside the chamber for 20 minutes at 200{degrees}C, 350{degrees}C and 500{degrees}C successively. X-ray photoelectron spectra were recorded at room temperature after each heating. The clean experimental conditions permitted the observation of reaction between Ti and SiO{sub 2} even at room temperature e.g. TiSi{sub x} and Ti-O-Si species were found in the Si-2p and O-1s spectra soon after the deposition of the titanium film. With increasing temperature oxygen diffused outward from the substrate initially into the TiSi{sub x} layer and subsequently into the titanium film where Ti(O) and TiO{sub x} formation was detected, leaving behind suboxides of silicon. This model is also verified by observing the depth distribution of the products by angle resolved XPS on a polished SiO{sub 2} sample. In the Ti-Na{sub 2}O{center_dot}2SiO{sub 2} system, TiSi{sub x} product formation was again observed at room temperature.
- OSTI ID:
- 258305
- Report Number(s):
- CONF-9506225-; TRN: 96:001884-0006
- Resource Relation:
- Conference: Surface analysis `95, University Park, PA (United States), 7-9 Jun 1995; Other Information: PBD: 1995; Related Information: Is Part Of Surface analysis `95. Final program; PB: 86 p.
- Country of Publication:
- United States
- Language:
- English
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