Comparison of the spatial statistics of random and defined-sequence photoresist films

Hinsberg, William D.; Houle, Frances A.

doi:10.1117/1.jmm.23.4.044601

Comparison of the spatial statistics of random and defined-sequence photoresist films

Journal Article · Tue Nov 19 23:00:00 EST 2024 · Journal of Micro/Nanopatterning, Materials, and Metrology

DOI:https://doi.org/10.1117/1.jmm.23.4.044601· OSTI ID:2551791

Hinsberg, William D. ^[1]; Houle, Frances A. ^[2]

Columbia Hill Technical Consulting, Fremont, CA (United States)
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

The resolution-line edge roughness-sensitivity tradeoff has motivated the exploration of potential improvements using defined sequence polymers and polymer-bound photoacid generators and quenchers. We characterize the internal structures of positive tone photoresist polymer films formed from defined sequence polymers and compare them with random copolymers of the same composition. We model their imaging to connect initially to developable film structures. We use a polymer packing algorithm to simulate films of diverse compositions and locations of photoacid generators and quenchers, using the composition of an ESCAP photoresist. We use a simple extreme ultraviolet exposure-deprotection algorithm to model developable image formation within them. In all cases, the spatial distribution of chemical moieties in the film for defined sequence polymers is nearly indistinguishable from random copolymers. We evaluate several exposure-deprotection scenarios and find that a defined sequence copolymer has a distinctive developable image under certain circumstances. The use of defined sequence polymers within a photoresist layer does not automatically result in improved imaging; however, they do have some characteristics different from random polymers of the same composition. Further study of these characteristics may provide a route to improved control over the nanoscale imaging process.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 2551791

Journal Information:: Journal of Micro/Nanopatterning, Materials, and Metrology, Journal Name: Journal of Micro/Nanopatterning, Materials, and Metrology Journal Issue: 04 Vol. 23; ISSN 2708-8340

Publisher:: SPIECopyright Statement

Country of Publication:: United States

Language:: English

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