A 2D fluid model of the DC planar magnetron cathode
This model finds the plasma density distribution, n(x,y), and the positive electrical potential, {phi}{sub {infinity}}, between the surface of a planar magnetron cathode and a distant, uniform plasma. The intended application is for parameter studies of gas discharges in the range of 1--100 mTorr, which are often used as sputtering sources. The primary results are formulas which show how the spatial variation of the magnetic field, B(x,y), shapes the plasma density and influences the potential, as well as determining the magnitude of the magnetron current parallel to the cathode surface.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 251390
- Report Number(s):
- UCRL-ID--122494; ON: DE96012250
- Country of Publication:
- United States
- Language:
- English
Similar Records
Comparing a 2D fluid model of the DC planar magnetron cathode to experiments
Designing planar magnetron cathodes: Analysis and experiment
Model for designing planar magnetron cathodes
Technical Report
·
Wed May 01 00:00:00 EDT 1996
·
OSTI ID:432345
Designing planar magnetron cathodes: Analysis and experiment
Conference
·
Tue Dec 30 23:00:00 EST 1997
·
OSTI ID:321045
Model for designing planar magnetron cathodes
Technical Report
·
Fri May 30 00:00:00 EDT 1997
·
OSTI ID:16554