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Development of Metal Boride/Carbide Precursors for Metal Organic Chemical Vapor Deposition (MOCVD) Applications [Slides]

Technical Report ·
DOI:https://doi.org/10.2172/2480095· OSTI ID:2480095
 [1];  [1];  [1]
  1. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
US Department of the Navy, Office of Naval Research (ONR); USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
2480095
Report Number(s):
SAND--2024-14654R
Country of Publication:
United States
Language:
English

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