Status and limitations of multilayer x-ray interference structures
Trends in the performance of x-ray multilayer interference structures with periods ranging from 9 to 130 {angstrom} are reviewed. Analysis of near-normal incidence reflectance data vs photon energy reveals that the effective interface with {sigma} in a static Debye-Waller model, describing interdiffusion and roughness, decreases as the multilayer period decreases, and reaches a lower limit of roughly 2 {angstrom}. Specular reflectance and diffuse scattering from uncoated and multilayer-coated substrates having different roughness suggest that this lower limit results largely from substrate roughness. The increase in interface width with period thus results from increasing roughness of interdiffusion as the layer thickness increases.
- Research Organization:
- Lawrence Berkeley Lab., CA (US)
- Sponsoring Organization:
- USDOE, Washington, DC (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 245555
- Report Number(s):
- LBL-38518; LSBL-319; CONF-9509134-2; ON: DE96011520; TRN: US0303515
- Resource Relation:
- Conference: 2. international symposium on magnetic multilayers, Cambridge (GB), 09/11/1995--09/14/1995; Other Information: Supercedes report DE96011520; PBD: Mar 1996; PBD: 1 Mar 1996
- Country of Publication:
- United States
- Language:
- English
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