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Determination of trace elements on polysilicates by ID-ICP-MS with ultrasonic nebulization/membrane desolvation

Conference ·
OSTI ID:245543

This work investigates the performance of an ID-ICP-MS (isotope dilution-inductively coupled plasma mass spectrometry) system with USN/MD (ultrasonic nebulization/membrane desolvation) sample introduction for the determination of trace metal impurities in polysilicon.

Research Organization:
Los Alamos National Lab., NM (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
W-7405-ENG-36
OSTI ID:
245543
Report Number(s):
LA-UR--96-1661; CONF-9605179--3; ON: DE96011269
Country of Publication:
United States
Language:
English