Design and fabrication of a two dimensional valveless micropump
- Oak Ridge National Lab., TN (United States)
The scale-down of a liquid mini-pump (order of 10 mm) to a micrometre scale has been attempted using a novel valveless nozzle-diffuser design and new application of an organic physical vapor-deposited membrane. The micropump employs no moving parts other than the membrane and accomplishes the rectification of fluid flow due to pressure recovery differences in the nozzle and diffuser flow directions. More specifically, liquids flow with less resistance (i.e. conduct more fluid) in the diffuser direction than the nozzle direction, for a given pressure differential. At the micrometre scale, the fabrication of the critical nozzle and diffuser elements was performed by focused ion beam (FIB) microlithography of glass slides. Etched slides were sandwiched to make two-dimensional venturis. Sternme and Sternme noted the importance of a lower Reynolds Number linfit on the desired pressure recovery which challenged the fabrication of this pump design at the scale used.
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 244181
- Report Number(s):
- CONF-951056-; TRN: 96:000930-0009
- Resource Relation:
- Conference: 10. annual meeting of the American Society for Precision Engineering, Austin, TX (United States), 15-20 Oct 1995; Other Information: PBD: 1995; Related Information: Is Part Of 10th annual meeting of the American Society for Prevision Engineering; PB: 480 p.
- Country of Publication:
- United States
- Language:
- English
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