Plasma Focused Ion Beam Nanothermometry

Technical Report · Wed Feb 01 04:00:00 EST 2023

DOI:https://doi.org/10.2172/2432030· OSTI ID:2432030

Hodges, Wyatt Lea ^[1]; Deitz, Julia ^[1]; Ruggles, Timothy ^[1]; Rosenberg, Samantha Gayle ^[1]; Boro, Joseph Robert ^[1]; Fowler, James Elliot ^[1]; Perry, Daniel Lee ^[1]; Lam, Mila Nhu ^[1]; Williard, John Newsom ^[1]; Jauregui, Luis Jose ^[1]; Wixom, Ryan R. ^[1]

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1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

In this report we detail demonstration of temperature dependent effects on grayscale intensity imaged in Focused Ion Beam (FIB) microscope, as well as secondary electron (SE) dependence on temperature in the Auger Electron Spectroscopy (AES) and a Scanning Electron Microscope (SEM). In each instrument an intrinsic silicon sample is imaged at multiple temperatures over the course of each experiment. The grayscale intensity is shown to scale with sample temperature. Sample preparation procedures are discussed, along with hypothesized explanations for unsuccessful trials. Anticipated outcomes and future directions for these measurements are also detailed.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA); USDOE Laboratory Directed Research and Development (LDRD) Program
• DOE Contract Number: NA0003525
• OSTI ID: 2432030
• Report Number(s): SAND--2023-11774R
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY