Effects of macroparticle weighting in axisymmetric particle-in-cell Monte Carlo collision simulations

Hara, Kentaro; Robertson, Timothy; Kenney, Jason; Rauf, Shahid

doi:10.1088/1361-6595/acb28b

Effects of macroparticle weighting in axisymmetric particle-in-cell Monte Carlo collision simulations

Journal Article · Thu Jan 26 00:00:00 EST 2023 · Plasma Sources Science and Technology

DOI:https://doi.org/10.1088/1361-6595/acb28b· OSTI ID:2421616

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Stanford Univ., CA (United States); OSTI
Stanford Univ., CA (United States)
Applied Materials, Inc., Santa Clara, CA (United States)

In this paper, the effects of macroparticle (MP) weighting on the plasma discharge, particularly near the centerline, are investigated using a two-dimensional axisymmetric particle-in-cell Monte Carlo collision (PIC/MCC) model. A variable MP weight according to the radial position of the MPs is employed to maintain sufficient number of MPs near the centerline of the plasma source. Finally, the plasma density obtained from the PIC/MCC simulations for low-pressure (25–100 mTorr) capacitively coupled plasmas is found to be artificially large when the MP weight near the centerline is not well resolved, demonstrating the need for particle convergence studies for axisymmetric PIC/MCC simulations.

View Accepted Manuscript (DOE)

Research Organization:: Stanford Univ., CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: SC0020623

OSTI ID:: 2421616

Alternate ID(s):: OSTI ID: 2479075

Journal Information:: Plasma Sources Science and Technology, Journal Name: Plasma Sources Science and Technology Journal Issue: 1 Vol. 32; ISSN 0963-0252

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Effects of macroparticle weighting in axisymmetric particle-in-cell Monte Carlo collision simulations

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